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  1. STD SiO2 recipe‏‎ (1 revision)
  2. Comparison of ash rate for different gas mixtures, especially between O2 only vs O2/N2 mixture.‏‎ (1 revision)
  3. Wafer Cleaver Recipes (LSD-155LT)‏‎ (1 revision)
  4. UCSBTEST1Gain4.jpg‏‎ (1 revision)
  5. ASML Stepper 3 - Substrates smaller than 100mm/4-inch‏‎ (1 revision)
  6. AUTOSTEP 200-PIECES instruction 6-20-19.pptx‏‎ (1 revision)
  7. MA6 Backside Alignment - Allowed Mark Locations‏‎ (1 revision)
  8. UV Ozone Quick Start‏‎ (1 revision)
  9. Oxford Etcher - Sample Size Effect on Etch Rate‏‎ (1 revision)
  10. Unaxis SOP 3-12-2020.docx‏‎ (1 revision)
  11. Publications - 2013-2014‏‎ (1 revision)
  12. PECVD1-SiN-standard recipe.pdf‏‎ (1 revision)
  13. Unaxis Test Recipe Page‏‎ (1 revision)
  14. Stepper 1 (GCA6300) How to select proper chuck‏‎ (1 revision)
  15. ASML Stepper 3 - Job Creator‏‎ (1 revision)
  16. SiN 100C Table-2019‏‎ (1 revision)
  17. Filmetrics F50 - Operating Procedure‏‎ (1 revision)
  18. ProcessGroup: Shipping Samples on Dicing Tape+Frame‏‎ (1 revision)
  19. Nanofab-IT - Add Device to Network‏‎ (1 revision)
  20. RIE5 - Standard Operating procedure (Cortex Software)‏‎ (1 revision)
  21. Sputter 5‏‎ (1 revision)
  22. Flood Exposure Recipes‏‎ (1 revision)
  23. Ellipsometer (Woollam) - Measuring thin dielectrics with Native Oxide pre-measurement‏‎ (1 revision)
  24. Stepper 1 (GCA 6300) Available chucks‏‎ (1 revision)
  25. Intellemetrics Laser Etch Monitor Procedure for Plasma-Therm Etchers‏‎ (1 revision)
  26. Hummer SEM Sample Coater - Techniques to reduce charging in SEMs‏‎ (1 revision)
  27. Equipment Group - Video Training Procedures‏‎ (1 revision)
  28. InP Etch test -details‏‎ (1 revision)
  29. TEST PAGE‏‎ (1 revision)
  30. YES Recipe Screenshots: STD-O2‏‎ (1 revision)
  31. Video Training - Introduction (Internal)‏‎ (1 revision)
  32. InP Etch Test-in details‏‎ (1 revision)
  33. AUTOSTEP 200-PIECES 1st litho BL and BR orientation.pptx‏‎ (1 revision)
  34. Stepper 1 (GCA 6300) Substrate Thickness, Shim Thickness ans Target Thickness‏‎ (1 revision)
  35. Surfscan Errors and Workarounds‏‎ (1 revision)
  36. Photomask Ordering Procedure for UCSB Users‏‎ (1 revision)
  37. Stepper 2 (AutoStep 200) - Operating Procedure - Piece Parts‏‎ (1 revision)
  38. Operating Instructions‏‎ (1 revision)
  39. PECVD.docx‏‎ (1 revision)
  40. PECVD1 Operating Instructions.pdf‏‎ (1 revision)
  41. Older Publications‏‎ (1 revision)
  42. YES Recipe Screenshots: STD-N2-O2‏‎ (1 revision)
  43. Advanced PECVD Recipes‏‎ (1 revision)
  44. Wafer coating procedure‏‎ (1 revision)
  45. LegacyTable‏‎ (1 revision)
  46. Lab Rules backup‏‎ (1 revision)
  47. Test Data of etching SiO2 with CHF3/CF4/O2‏‎ (2 revisions)
  48. GCA 6300 training manual -old instructions‏‎ (2 revisions)
  49. Test Page‏‎ (2 revisions)
  50. PECVD1-SIN Standard Recipe (PlasmaTherm 790)‏‎ (2 revisions)

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