Vacuum Deposition Recipes

From UCSB Nanofab Wiki
Jump to: navigation, search

  • R = Recipe is available. Clicking this link will take you to the recipe.
  • A = Material is available for use, but no recipes are provided.
Vacuum Deposition Recipes

E-Beam Evaporation Sputtering Thermal Evaporation Plasma Enhanced Chemical
Vapor Deposition (PECVD)
Atomic Layer Deposition Molecular Vapor Deposition
Material E-Beam 1 (Sharon) E-Beam 2 (Custom) E-Beam 3 (Temescal) E-Beam 4 (CHA) Sputter 1 (Custom) Sputter 2
(SFI Endeavor)
Sputter 3
(ATC 2000-F)
Sputter 4
(ATC 2200-V)
Sputter 5 (Lesker AXXIS) Ion Beam
Deposition (Tool)
Thermal
Evap 1
Thermal Evap 2 (Solder) PECVD 1
(PlasmaTherm 790)
PECVD 2
(Advanced Vacuum)
Unaxis VLR ICP-PECVD Atomic Layer Deposition (Tool) Molecular Vapor Deposition (Tool)
Ag A
A A

A A








Al A
A A
R A R

A A




Al2O3 A A



A A
A




R
AlN




R A A
A




R
Au A
A A
R A R

A A




B
















Co A

A

A









Cr A

A

A


A A




Cu A




A A








Fe A

A

A









Ge A
A A

A A








GeO2 A
Gd A

A












Hf A















HfO2





A A






R
In










A




Ir A















ITO
A



A A
A






MgF2 A A
MgO A
Mo A




A A








Nb A





R








Nd





A








Ni A
A A

R


A A




NiCr A A
NiFe A A A
Pd A
A A





A A




Pt A
A A

A R








Ru A

A












Si
A



A A




R R

SiN





R A
R

R R R

SiO2 A A



R A
R

R R R R
SiOxNy








R

R



Sn










A




SrF2
A














Ta A




R A








Ta2O5


A




R






Ti A
A A

A R








TiN




A
R
A






TiW A




A R








TiO2
A


R A A
R




R
V





A A








W A




A R








Zn









A A




ZnO
















Zr A

A

A A








ZrO2














R
Material E-Beam 1 (Sharon) E-Beam 2 (Custom) E-Beam 3 (Temescal) E-Beam 4 (CHA) Sputter 1 (Custom) Sputter 2
(SFI Endeavor)
Sputter 3
(ATC 2000-F)
Sputter 4
(ATC 2200-V)
Sputter 5 (Lesker AXXIS) Ion Beam
Deposition (Tool)
Thermal
Evap 1
Thermal Evap 2 (Solder) PECVD 1
(PlasmaTherm 790)
PECVD 2
(Advanced Vacuum)
Unaxis VLR ICP-PECVD Atomic Layer Deposition (Tool) Molecular Vapor Deposition (Tool)
Personal tools
Namespaces

Variants
Actions
Navigation
Equipment
Processes
Tools
TEMPORARY